Flexible planar Hall effect sensor with sub-200 pT resolution
نویسندگان
چکیده
Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, they can easily conform to irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic fabricated on a polyamide tape with an equivalent noise (EMN) better than 200 pT/Hz. The sensor is characterized in flat bent states radius of 10 mm. An EMN 400 pT/Hz states, respectively, achieved at frequency 100 Hz. remarkable combined simple, low-cost fabrication process makes these promising candidate flexible electronics.
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2023
ISSN: ['1520-8842', '0003-6951', '1077-3118']
DOI: https://doi.org/10.1063/5.0156588